Fabrication of Metal Nanoparticle Arrays in the ZrO2(Y), HfO2(Y), and GeOx Films by Magnetron Sputtering oleh Oleg Gorshkov, Ivan Antonov, Dmitry Filatov, Maria Shenina, Alexander Kasatkin, Alexander Bobrov, Maria Koryazhkina, Irina Korotaeva, Mikhail Kudryashov

"…The single sheet arrays of Au nanoparticles (NPs) embedded into the ZrO2(Y), HfO2(Y), and GeOx (x≈2) films have been fabricated by the alternating deposition of the nanometer-thick dielectric and metal films using Magnetron Sputtering followed by annealing. …"
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Improvement on the onset voltage for electroluminescent devices based in a SiOx/SiOy bilayer obtained by sputtering oleh A S L Salazar-Valdez, K Monfil-Leyva, F Morales-Morales, Z J Hernández Simón, A L Muñoz-Zurita, J A Luna López, J A D Hernández de la Luz, F Uribe González, A Morales-Sánchez

"…This work is focused on the composition, optical and electroluminescent properties of silicon rich oxide (SiO _x , x < 2) films monolayers and bilayers (SiO _x /SiO _y ) deposited by Sputtering with silicon excess between 6.2 to 10.7 at.% were deposited on p-type (100) silicon substrates. …"
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