Find in Library

Magnetic levitation positioning system (MLPS) is considered to be the state of the art in inspection and manufacturing systems in vacuum. In this paper, a magnetic gravity compensator with annular magnet array (AMA-MGC) for MLPS is proposed. Benefiting from the double-layer annular Halbach magnet array on the stator, the proposed AMA-MGC possesses the advantages of symmetrical force, high force density and small force fluctuation. Firstly, the basic structure and operation principle of the AMA-MGC are introduced. Secondly, the basic characteristics of the AMA-MGC such as magnetic field distribution, levitation force, parasitic force and parasitic torque are analyzed by the three-dimensional finite element analysis (3-D FEA). Thirdly, the influence of structural parameters on force density and force fluctuation is investigated, which is conductive to the design and optimization of the AMA-MGC. Finally, a prototype of the AMA-MGC is constructed, and the experiment shows good agreement with the 3-D FEA results.