Conformal and Transparent Al<sub>2</sub>O<sub>3</sub> Passivation Coating via Atomic Layer Deposition for High Aspect Ratio Ag Network Electrodes

oleh: Ju-Hyeon Lee, Tae-Yang Choi, Ho-Sung Cheon, Hye-Young Youn, Gun-Woo Lee, Sung-Nam Lee, Han-Ki Kim

Format: Article
Diterbitkan: MDPI AG 2023-03-01

Deskripsi

We demonstrated conformal Al<sub>2</sub>O<sub>3</sub> passivation via atomic layer deposition (ALD) of a flexible Ag network electrode possessing a high aspect ratio. The Ag network electrode passivated by the ALD-grown Al<sub>2</sub>O<sub>3</sub> film demonstrated constant optical transmittance and mechanical flexibility relative to the bare Ag network electrode. Owing to the conformal deposition of the Al<sub>2</sub>O<sub>3</sub> layer on the high aspect ratio Ag network electrode, the electrode exhibited more favorable stability than its bare Ag-network counterpart. To demonstrate the feasibility of Al<sub>2</sub>O<sub>3</sub> passivation via ALD on a flexible Ag network, the performances of flexible and transparent thin-film heaters (TFHs) with both a bare Ag network and that passivated by ALD-grown Al<sub>2</sub>O<sub>3</sub> were compared. The performance of Al<sub>2</sub>O<sub>3</sub>/Ag network-based TFHs was minimally altered even after harsh environmental tests at 85% relative humidity and a temperature of 85 °C, while the performance of bare electrode-based TFHs significantly deteriorated. The improved stability and reliability of the Al<sub>2</sub>O<sub>3</sub>/Ag network-based TFHs indicate that the ALD-grown Al<sub>2</sub>O<sub>3</sub> film effectively prevents the introduction of moisture and impurities into the Ag network with a high aspect ratio. The improvement in the stability of the Ag network through Al<sub>2</sub>O<sub>3</sub> passivation implies that the ALD-grown Al<sub>2</sub>O<sub>3</sub> film represents a promising transparent and flexible thin film passivation material for high quality Ag network electrodes with high aspect ratios.