Find in Library
Search millions of books, articles, and more
Indexed Open Access Databases
Optimization of Ultra-Thin Pulsed-DC Magnetron Sputtered Aluminum Films for the Technology of Hyperbolic Metamaterials
oleh: Robert Mroczyński, Daniel Iwanicki, Bartosz Fetliński, Monika Ożga, Michał Świniarski, Arkadiusz Gertych, Mariusz Zdrojek, Marek Godlewski
Format: | Article |
---|---|
Diterbitkan: | MDPI AG 2020-05-01 |
Deskripsi
The future applications of hyperbolic metamaterials demand stacks of materials with alternative ultra-thin conductive/dielectric films with good homogeneity of the thickness and reduced roughness level. In this work, the technology of pulsed-DC magnetron sputtering of aluminum was optimized using the Taguchi method in order to fabricate Al films with improved roughness level. The performed structural characterization proved the smaller Al domains and better homogeneity of the surface. The optimized process was used to fabricate a multilayer structure of Al/HfO<sub>x</sub> as the metamaterial media. The fabricated structures were optically characterized in the UV/VIS range. The presented findings demonstrated the tunability effect of the effective reflectance of the examined stacks. The presented results are promising for the future application of multilayer structures in novel photonic devices based on hyperbolic metamaterials.