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SiO2/Si core-shell nanowires array coated with gap-rich silver nanoparticles were demonstrated as a highly reproducible surface-enhanced Raman scattering (SERS) substrate. SERS detection of a relative standard deviation of 8% for 10−4 M R6G with a spot size of ∼2 μm and 900 spots over an area of 150 × 150 μm2 was reported. The high reproducibility is ascribed to the polarization-independent electrical field distribution among three-dimensional nanowire structure with an optimized thickness of SiO2 shell layer.