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We investigate the possibilities to realize light extraction from single crystal diamond (SCD) nanopillars. This was achieved by dedicated 519 nm laser-induced spin-state initiation of negatively charged nitrogen vacancies <i>(NV⁻)</i>. We focus on the naturally-generated by chemical vapor deposition (CVD) growth of <i>NV⁻</i>. Applied diamond was neither implanted with ¹⁴N⁺, nor was the CVD synthesized SCD annealed. To investigate the possibility of light extraction by the utilization of <i>NV⁻</i>’s bright photoluminescence at room temperature and ambient conditions with the waveguiding effect, we have performed a top-down nanofabrication of SCD by electron beam lithography (EBL) and dry inductively-coupled plasma/reactive ion etching (ICP-RIE) to generate light focusing nanopillars. In addition, we have fluorinated the diamond’s surface by dedicated 0 V SF₆ ICP plasma. Light extraction and spin manipulations were performed with photoluminescence (PL) spectroscopy and optically detected magnetic resonance (ODMR) at room temperature. We have observed a remarkable effect based on the selective 0 V SF₆ plasma etching and surprisingly, in contrast to literature findings, deactivation of <i>NV⁻</i> centers. We discuss the possible deactivation mechanism in detail.