Transfer Printing of AlGaInAs/InP Etched Facet Lasers to Si Substrates

oleh: Ruggero Loi, James O'Callaghan, Brendan Roycroft, Cedric Robert, Alin Fecioru, Antonio Jose Trindade, Agnieszka Gocalinska, Emanuele Pelucchi, Christopher A. Bower, Brian Corbett

Format: Article
Diterbitkan: IEEE 2016-01-01

Deskripsi

InP-etched facet ridge lasers emitting in the optical C-band are heterogeneously integrated on Si substrates by microtransfer printing for the first time. 500 &#x03BC;m &#x00D7; 60 &#x03BC;m laser coupons are fabricated with a highly dense pitch on the native InP substrate. The laser epitaxial structure contains a 1-&#x03BC;m-thick InGaAs sacrificial layer. A resist anchoring system is used to restrain the devices while they are released by selectively etching the InGaAs layer with FeCl<sub>3</sub>:H<sub>2</sub>O (1:2) at 8 &#x00B0;C. Efficient thermal sinking is achieved by evaporating Ti-Au on the Si target substrate and annealing the printed devices at 300 &#x00B0;C. This integration strategy is particularly relevant for lasers being butt coupled to polymer or silicon-on-insulator (SOI) waveguides.