Analysis of Cu-Graphene Interconnects

oleh: Zi-Han Cheng, Wen-Sheng Zhao, Da-Wei Wang, Jing Wang, Linxi Dong, Gaofeng Wang, Wen-Yan Yin

Format: Article
Diterbitkan: IEEE 2018-01-01

Deskripsi

Due to its ultrathin feature, graphene has been recently proposed as diffusion barrier layer for Cu wires. This paper is geared toward developing an equivalent single-conductor (ESC) transmission-line (TL) model for analysis of Cu-graphene interconnects, i.e., Cu wires encapsulated with graphene barriers. Based on the ESC TL model, electrical performances of Cu-graphene interconnects are examined and evaluated. It is shown that the time delay and temperature rise can be reduced by replacing the conventional diffusion barriers in the Cu/low-k interconnect with the graphene barriers.