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Control of Eu Oxidation State in Y<sub>2</sub>O<sub>3−x</sub>S<sub>x</sub>:Eu Thin-Film Phosphors Prepared by Atomic Layer Deposition: A Structural and Photoluminescence Study
oleh: José Rosa, Jonas Deuermeier, Pekka J. Soininen, Markus Bosund, Zhen Zhu, Elvira Fortunato, Rodrigo Martins, Mutsumi Sugiyama, Saoussen Merdes
Format: | Article |
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Diterbitkan: | MDPI AG 2019-12-01 |
Deskripsi
Structural and photoluminescence studies were carried out on Eu-doped Y<sub>2</sub>O<sub>3−x</sub>S<sub>x</sub> thin films grown by atomic layer deposition at 300 °C. (CH<sub>3</sub>Cp)<sub>3</sub>Y, H<sub>2</sub>O, and H<sub>2</sub>S were used as yttrium, oxygen, and sulfur precursors, respectively, while Eu(thd)<sub>3</sub> was used as the europium precursor. The Eu oxidation state was controlled during the growth process by following the Eu(thd)<sub>3</sub> pulse with either a H<sub>2</sub>S or O<sub>3</sub> pulse. The Eu(thd)<sub>3</sub>/O<sub>3</sub> pulse sequence led to photoluminescence emission above 550 nm, whereas the Eu(thd)<sub>3</sub>/H<sub>2</sub>S pulse sequence resulted in emission below 500 nm.