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The pendulum impact scratch device with high precision system in measuring normal and tangential forces during scratching has been used to study elastic modulus of coatings. The criterion for evaluation of elastic modulus of coating and its experimental principle have been described and a series SiC and SiN thin films coated by PNCVD have been tested. The test results indicate that elastic modulus of SiC coatings has a good line relationship with Si content and there is a peak value in middle Si content. The experimental results also show that the newly developed device is useful in the evaluation of elastic modulus of coating especially under dynamic state and the method is characterised by reliability, validity and simplicity.