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This paper presents an optimized way of lead zirconate titanate (PZT) deposition in order<br />to selectively grow three different (100/001), (110), and (111) crystal orientation in two different<br />thickness ranges, thinner and thicker than 400 nm. The thickness of the PZT layer is also optimized<br />to not diminish the generated bending moment more than 10%. A 1&#956;m PZT layer with (100/001)<br />dominant crystal orientation and highly columnar crystal structure is deposited and used in the<br />fabrication of a circular PMUT. The PMUT has a 410 &#956;m diameter and resonates at 462 kHz with<br />the displacement of 1200 nm/V.