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Beryllium film deposition was studied with cavity samples in remote areas of the inner and outer JET divertor and below divertor tile 5 during the 2011–2012 campaign with the ITER-like wall. Predominantly beryllium films were formed inside the cavities with some additional carbon, the ratio Be/C was >2. These deposited layers had high D/(Be+C) ratios of about 0.3. The formation of these films is mainly due to sticking of beryllium-containing particles with low sticking coefficients <0.5. The observed surface loss probabilities depend on the position in the divertor. The particles responsible for film deposition originated from the location of in the divertor strike points. Keywords: Deuterium, Beryllium, Co-deposition, JET