A Novel Super-Junction DT-MOS with Floating p Regions to Improve Short-Circuit Ruggedness

oleh: Sujie Yin, Wei Cao, Xiarong Hu, Xinglai Ge, Dong Liu

Format: Article
Diterbitkan: MDPI AG 2023-10-01

Deskripsi

A novel super-junction (SJ) double-trench metal oxide semiconductor field effect transistor (DT-MOS) is proposed and studied using Synopsys Sentaurus TCAD in this article. The simulation results show that the proposed MOSFET has good static performance and a longer short-circuit withstand time (<i>t</i><sub>sc</sub>). The super-junction structure enables the device to possess an excellent compromise of breakdown voltage (<i>BV</i>) and specific on-resistance (<i>R</i><sub>on,sp</sub>). Under short-circuit conditions, the depletion of p-pillar, p-shield, and floating p regions can effectively reduce saturation current and improve short-circuit capability. The proposed device has minimum gate-drain charge (<i>Q</i><sub>gd</sub>) and gate-drain capacitance (<i>C</i><sub>gd</sub>) compared with other devices. Moreover, the formation of floating p regions will not lead to an increase in process complexity. Therefore, the proposed MOSFET can maintain good dynamic and static performance and short-circuit ability together without increasing the difficulty of the process.