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Stabilization of silicon micro-resonators is a key requirement for their inclusion in larger photonic integrated circuits. In particular, thermal refractive index shift in non-linear applications can detune devices from their optimal working point. A cavity stabilization scheme using a micro-processor-based feedback control loop is presented based on a local thermal heater element on-chip. Using this method, a silicon π -phase shifted grating with a cavity Q-factor of 40k is demonstrated to operate over an ambient temperature detuning range of 40 ∘ C and injection wavelength range of 1.5 nm, nearly 3 orders of magnitude greater than the resonant cavity linewidth.