Find in Library
Search millions of books, articles, and more
Indexed Open Access Databases
Recent Advances in Sequential Infiltration Synthesis (SIS) of Block Copolymers (BCPs)
oleh: Eleonora Cara, Irdi Murataj, Gianluca Milano, Natascia De Leo, Luca Boarino, Federico Ferrarese Lupi
| Format: | Article |
|---|---|
| Diterbitkan: | MDPI AG 2021-04-01 |
Deskripsi
In the continuous downscaling of device features, the microelectronics industry is facing the intrinsic limits of conventional lithographic techniques. The development of new synthetic approaches for large-scale nanopatterned materials with enhanced performances is therefore required in the pursuit of the fabrication of next-generation devices. Self-assembled materials as block copolymers (BCPs) provide great control on the definition of nanopatterns, promising to be ideal candidates as templates for the selective incorporation of a variety of inorganic materials when combined with sequential infiltration synthesis (SIS). In this review, we report the latest advances in nanostructured inorganic materials synthesized by infiltration of self-assembled BCPs. We report a comprehensive description of the chemical and physical characterization techniques used for <i>in situ</i> studies of the process mechanism and <i>ex situ</i> measurements of the resulting properties of infiltrated polymers. Finally, emerging optical and electrical properties of such materials are discussed.