Design and Simulation Investigation of Si<sub>3</sub>N<sub>4</sub> Photonics Circuits for Wideband On-Chip Optical Gas Sensing around 2 µm Optical Wavelength

oleh: Natnicha Koompai, Papichaya Chaisakul, Pichet Limsuwan, Xavier Le Roux, Laurent Vivien, Delphine Marris-Morini

Format: Article
Diterbitkan: MDPI AG 2021-04-01

Deskripsi

We theoretically explore the potential of Si<sub>3</sub>N<sub>4</sub> on SiO<sub>2</sub> waveguide platform toward a wideband spectroscopic detection around the optical wavelength of 2 μm. The design of Si<sub>3</sub>N<sub>4</sub> on SiO<sub>2</sub> waveguide architectures consisting of a Si<sub>3</sub>N<sub>4</sub> slot waveguide for a wideband on-chip spectroscopic sensing around 2 μm, and a Si<sub>3</sub>N<sub>4</sub> multi-mode interferometer (MMI)-based coupler for light coupling from classical strip waveguide into the identified Si<sub>3</sub>N<sub>4</sub> slot waveguides over a wide spectral range are investigated. We found that a Si<sub>3</sub>N<sub>4</sub> on SiO<sub>2</sub> slot waveguide structure can be designed for using as optical interaction part over a spectral range of interest, and the MMI structure can be used to enable broadband optical coupling from a strip to the slot waveguide for wideband multi-gas on-chip spectroscopic sensing. Reasons for the operating spectral range of the system are discussed.