New Volatile Tantalum Imido Precursors with Carboxamide Ligands
oleh: Jeong Min Hwang, Sung Kwang Lee, Sunyoung Shin, Ji-Seoung Jeong, Hae Sun Kim, Ji Yeon Ryu, Taeyong Eom, Bo Keun Park, Chang Gyoun Kim, Taek-Mo Chung
| Format: | Article |
|---|---|
| Diterbitkan: | American Chemical Society 2021-09-01 |
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