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In this study, the hot-air drying of caraway seeds was enhanced using two nonthermal physical field technologies: cold plasma (CP) and ultrasonic waves (US). Air drying temperatures of 35, 45, and 55 °C with CP pretreatment exposure times (CP_t) of 25 and 50 s were used. When convective drying was accompanied by US, power levels (US_p) of 60, 120, and 180 W were applied. Experimentally, the most effective contribution was found by using both CP pretreatment (25 s) and US (180 W), in which the maximum decreases of 31% and 39% were estimated for the drying period and specific energy consumption, respectively. The total color change, the rupture force, <i>TPC</i>, <i>TFC</i>, and antioxidant capacity were also estimated for evaluating the quality of dried products. In a CP-US-assisted drying program (25 s, 180 W), the minimum change in color and the rupture force were found to be 6.40 N and 20.21 N, respectively. Compared to the pure air drying, the combined application of CP and US resulted in a mean increase of 53.2, 43.6, and 24.01% in <i>TPC</i>, <i>TFC</i>, and antioxidant capacity of extracts at the temperature of 35 °C. Based on the response surface methodology (RSM) approach and obtained experimental data, accurate mathematical predictive models were developed for finding the optimal drying condition. The optimization process revealed that 39 °C, 180 W, and 23 s resulted in a desirability of 0.78 for drying caraway seeds.