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λ/30 inorganic features achieved by multi-photon 3D lithography
oleh: Feng Jin, Jie Liu, Yuan-Yuan Zhao, Xian-Zi Dong, Mei-Ling Zheng, Xuan-Ming Duan
Format: | Article |
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Diterbitkan: | Nature Portfolio 2022-03-01 |
Deskripsi
Stereolithography has progressed over the years but resolution and feature size is still limited by the properties of materials and resins. Here, the authors demonstrate femtosecond laser direct writing of a hydrogen silsesquioxane photoresist using a 780 nm femtosecond laser demonstrating feature sizes of 26 nm.