λ/30 inorganic features achieved by multi-photon 3D lithography

oleh: Feng Jin, Jie Liu, Yuan-Yuan Zhao, Xian-Zi Dong, Mei-Ling Zheng, Xuan-Ming Duan

Format: Article
Diterbitkan: Nature Portfolio 2022-03-01

Deskripsi

Stereolithography has progressed over the years but resolution and feature size is still limited by the properties of materials and resins. Here, the authors demonstrate femtosecond laser direct writing of a hydrogen silsesquioxane photoresist using a 780 nm femtosecond laser demonstrating feature sizes of 26 nm.