Find in Library
Search millions of books, articles, and more
Indexed Open Access Databases
Demonstration of Vertical GaN Schottky Barrier Diode With Robust Electrothermal Ruggedness and Fast Switching Capability by Eutectic Bonding and Laser Lift-Off Techniques
oleh: Qi Wei, Feng Zhou, Weizong Xu, Fangfang Ren, Dong Zhou, Dunjun Chen, Rong Zhang, Youdou Zheng, Hai Lu
Format: | Article |
---|---|
Diterbitkan: | IEEE 2022-01-01 |
Deskripsi
In this letter, we have successfully transferred the 4-inch crack-free GaN films from sapphire substrate to conductive silicon wafer by employing eutectic bonding and laser lift-off (LLO) techniques. The resultant 1-mm2 fully-vertical GaN Schottky barrier diodes (SBDs) exhibit a high current swing of 109, a low ideality factor of 1.03 and a high forward current of 10 A. Meanwhile, a decent breakdown voltage of 312 V is achieved, which is over 3 times higher than that of control device without performing epitaxial lift-off. Most importantly, such rectifiers show significantly enhanced electrothermal ruggedness, achieving a high surge-current density of 2.6 kA/cm2 and a low thermal resistance of 0.77 K·cm2/W. In addition, the excellent power rectification capability with a low reverse recovery time of 14 ns is obtained under high-speed switching condition with a high current ramp rate (<inline-formula> <tex-math notation="LaTeX">$di/dt$ </tex-math></inline-formula>) of 275 <inline-formula> <tex-math notation="LaTeX">${\mathrm {A/\mu s}}$ </tex-math></inline-formula>, implying the desired functionality of the LLO-vertical device architecture. These results thus present the great potentials of the substrate-transferred GaN SBDs for high-power and high-efficiency applications.