Thermal roll-to-roll nanoimprinting using a replica mold without release agent
oleh: Noriyuki UNNO, Shohei KAKIMOTO, Tapio MÄKELÄ, Shin HIWASA, Jun TANIGUCHI
| Format: | Article |
|---|---|
| Diterbitkan: | The Japan Society of Mechanical Engineers 2018-10-01 |
Deskripsi
Thermal roll-to-roll nanoimprint (T-R2RNIL) using a flexible replica mold made of a special UV-curable resin was demonstrated. This UV-curable resin is able to be used for the nanoimprint process without a release agent. In this study, we examined the relationship between the hardness of the UV-curable resin and the transfer performance using flexible replica molds made of three types of UV-curable resins. The experimental result found that one special resin is a good candidate for fabrication of a replica mold for T-R2RNIL because of its high hardness and good release properties.