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Dual-Passband SAW Filter Based on a 32°YX-LN/SiO<sub>2</sub>/SiC Multilayered Substrate
oleh: Huiping Xu, Sulei Fu, Rongxuan Su, Peisen Liu, Rui Wang, Fei Zeng, Cheng Song, Weibiao Wang, Feng Pan
Format: | Article |
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Diterbitkan: | MDPI AG 2023-02-01 |
Deskripsi
To meet the demands of highly integrated and miniaturized radio frequency front-end (RFFE) modules, multi-passband filters which support multi-channel compounding come to the foreground. In this work, we proposed a new design of a dual-passband surface acoustic wave (SAW) filter based on a 32°YX-LiNbO<sub>3</sub> (LN)/SiO<sub>2</sub>/SiC multilayered structure. The filter is of a standalone ladder topology and comprises dual-mode resonators, in which the shear horizontal (SH) mode and high-order SH mode are simultaneously excited through electrode thickness modulation. The impact of electrode thickness on the performance of the dual-mode resonator was systematically investigated by the finite element method (FEM), and resonators were prepared and verified the simulation results. The electromechanical coupling coefficients (<i>K</i><sup>2</sup>) of the SH modes are 15.1% and 17.0%, while the maximum <i>Bode-Q</i> (<i>Q</i><sub>max</sub>) values are 150 and 247, respectively, for the fabricated resonators with wavelengths of 1 μm and 1.1 μm. In terms of the high-order SH modes in these resonators, the <i>K</i><sup>2</sup> values are 9.8% and 8.4%, and <i>Q</i><sub>max</sub> values are 190 and 262, respectively. The fabricated dual-band filter shows the center frequencies (<i>f</i><sub>c</sub>) of 3065 MHz and 4808 MHz as two bands, with 3-dB fractional bandwidths (FBW) of 5.1% and 5.9%, respectively. Such a dual-band SAW filter based on a conventional ladder topology is meaningful in terms of its compact layout and diminished area occupancy. This work provides a promising avenue to constitute a high-performance dual-passband SAW filter for sub-6 GHz RF application.