High Performance <inline-formula> <tex-math notation="LaTeX">${\beta}$ </tex-math></inline-formula>-Ga<sub>2</sub>O<sub>3</sub> Nano-Membrane Field Effect Transistors on a High Thermal Conductivity Diamond Substrate

oleh: Jinhyun Noh, Sami Alajlouni, Marko J. Tadjer, James C. Culbertson, Hagyoul Bae, Mengwei Si, Hong Zhou, Peter A. Bermel, Ali Shakouri, Peide D. Ye

Format: Article
Diterbitkan: IEEE 2019-01-01

Deskripsi

To suppress severe self-heating under high power density, we herein demonstrate top-gate nano-membrane &#x03B2;-gallium oxide (&#x03B2;-Ga<sub>2</sub>O<sub>3</sub>) field effect transistors on a high thermal conductivity diamond substrate. The devices exhibit enhanced performance, with a record high maximum drain current of 980 mA/mm for top-gate &#x03B2;-Ga<sub>2</sub>O<sub>3</sub> field effect transistors and 60% less temperature increase from reduced self-heating, compared to the device on a sapphire substrate operating under identical power density. With improved heat dissipation, &#x03B2;-Ga<sub>2</sub>O<sub>3</sub> field effect transistors on a diamond substrate are validated using an ultrafast high-resolution thermoreflectance imaging technique, Raman thermography, and thermal simulations.