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An actively controlled silicon ring resonator with a fully tunable Fano resonance
oleh: A. Li, W. Bogaerts
| Format: | Article |
|---|---|
| Diterbitkan: | AIP Publishing LLC 2017-09-01 |
Deskripsi
We demonstrate a novel way to generate Fano resonance with tunable wavelength, extinction ratio, and slope rate. The device is a silicon add-drop microring with two integrated tunable reflectors inside, which form an embedded Fabry-Perot cavity. The fabrication is executed at a commercial CMOS foundry. Fano resonance at the drop port is generated from the interference between the Fabry-Perot cavity mode and the ring resonance mode. By tuning the reflectivities of these two reflectors with integrated heaters, various Fano resonance shapes can be achieved with a maximum extinction ratio over 40 dB and a slope rate more than 700 dB/nm.