Collective fabrication of guided longitudinal SAW resonator without Bragg grating mirror
oleh: Thomas Baron, Stefania Oliveri, Thomas Richard, Valerie Soumann, Djaffar Belharet, Laurent Robert, Marina Raschetti, Roland Salut, Emilie Courjon, Thierry Laroche, Florent Bernard, Alexandre Clairet, Sylvain Ballandras
| Format: | Article |
|---|---|
| Diterbitkan: | Wiley 2023-06-01 |
Deskripsi
Abstract This Research article document discussed about a new structure composed of a sub‐micron‐thick layer of a single‐crystal piezoelectric material on a substrate. Longitudinal waves are used for experimental demonstration with 4’’ collective processes. Electrical experimental–computation validate the concept with Q × f products near 1012.