Radio Frequency Plasma-Enhanced Reactive Magnetron Sputtering Deposition of α‑SiNx on Photonic CrystalLaser Diodes for Facet Passivation
oleh: Yuancheng Wang, Hongwei Qu, Yufei Wang, Fengxin Dong, Zhonghao Chen, Wanhua Zheng
| Format: | Article |
|---|---|
| Diterbitkan: | American Chemical Society 2019-11-01 |
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