Magnetic Micro Sensors with Two Magnetic Field Effect Transistors Fabricated Using the Commercial Complementary Metal Oxide Semiconductor Process

oleh: Wei-Ren Chen, Yao-Chuan Tsai, Po-Jen Shih, Cheng-Chih Hsu, Ching-Liang Dai

Format: Article
Diterbitkan: MDPI AG 2020-08-01

Deskripsi

The fabrication and characterization of a magnetic micro sensor (MMS) with two magnetic field effect transistors (MAGFETs) based on the commercial complementary metal oxide semiconductor (CMOS) process are investigated. The magnetic micro sensor is a three-axis sensing type. The structure of the magnetic microsensor is composed of an x/y-MAGFET and a z-MAGFET. The x/y-MAGFET is employed to sense the magnetic field (MF) in the <i>x</i>- and <i>y</i>-axis, and the z-MAGFET is used to detect the MF in the <i>z</i>-axis. To increase the sensitivity of the magnetic microsensor, gates are introduced into the two MAGFETs. The sensing current of the MAGFET enhances when a bias voltage is applied to the gates. The finite element method software Sentaurus TCAD was used to analyze the MMS’s performance. Experiments show that the MMS has a sensitivity of 182 mV/T in the <i>x</i>-axis MF and a sensitivity of 180 mV/T in the <i>y</i>-axis MF. The sensitivity of the MMS is 27.8 mV/T in the <i>z</i>-axis MF.