Rapid fabrication of complex nanostructures using room-temperature ultrasonic nanoimprinting
oleh: Junyu Ge, Bin Ding, Shuai Hou, Manlin Luo, Donguk Nam, Hongwei Duan, Huajian Gao, Yee Cheong Lam, Hong Li
| Format: | Article |
|---|---|
| Diterbitkan: | Nature Portfolio 2021-05-01 |
Deskripsi
Nanoimprinting faces challenges with imprinting hard materials at low or room temperature, and with fabricating complex nanostructures rapidly. Here, the authors overcome these challenges by a room-temperature ultrasonic nanoimprinting technique that capitalizes on the concentration of ultrasonic energy flow at nanoscale.