Massively parallel cantilever-free atomic force microscopy

oleh: Wenhan Cao, Nourin Alsharif, Zhongjie Huang, Alice E. White, YuHuang Wang, Keith A. Brown

Format: Article
Diterbitkan: Nature Portfolio 2021-01-01

Deskripsi

Atomic force microscopy (AFM) provides high resolution, but is limited to small areas. Here, the authors introduce a massively parallel AFM approach with >1000 probes in a cantilever-free probe architecture, and present an optical method for detecting probe–sample contact with sub-10 nm vertical precision.