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Massively parallel cantilever-free atomic force microscopy
oleh: Wenhan Cao, Nourin Alsharif, Zhongjie Huang, Alice E. White, YuHuang Wang, Keith A. Brown
Format: | Article |
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Diterbitkan: | Nature Portfolio 2021-01-01 |
Deskripsi
Atomic force microscopy (AFM) provides high resolution, but is limited to small areas. Here, the authors introduce a massively parallel AFM approach with >1000 probes in a cantilever-free probe architecture, and present an optical method for detecting probe–sample contact with sub-10 nm vertical precision.