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The hydrogen absorption/desorption processes of (111)-textured and normal palladium (Pd) thin films of thickness ranging from 8 to 48 nm are investigated using X-ray diffractometry. The one-dimensional expansion of Pd lattice due to the substrate clamping is observed at the low hydrogen composition phase while both out-of-plane and in-plane expansions are detected at the high hydrogen composition phase. Accordingly, using a biaxial Poisson’s ratio, an anisotropic expansion factor is proposed for describing such phenomenon quantitatively and the hydrogen composition dependence on this factor is investigated.