Wafer-scale nanofabrication of telecom single-photon emitters in silicon
oleh: Michael Hollenbach, Nico Klingner, Nagesh S. Jagtap, Lothar Bischoff, Ciarán Fowley, Ulrich Kentsch, Gregor Hlawacek, Artur Erbe, Nikolay V. Abrosimov, Manfred Helm, Yonder Berencén, Georgy V. Astakhov
| Format: | Article |
|---|---|
| Diterbitkan: | Nature Portfolio 2022-12-01 |
Deskripsi
The recently demonstrated approaches to fabrication of quantum emitters in silicon result in their random positioning, hindering applications in quantum photonic integrated circuits. Here the authors demonstrate controlled fabrication of telecom-wavelength quantum emitters in silicon wafers by focused ion beams.