Novel Method for Electroless Etching of 6H–SiC

oleh: Gyula Károlyházy, Dávid Beke, Dóra Zalka, Sándor Lenk, Olga Krafcsik, Katalin Kamarás, Ádám Gali

Format: Article
Diterbitkan: MDPI AG 2020-03-01

Deskripsi

In this article, we report an electroless method to fabricate porous hexagonal silicon carbide and hexagonal silicon carbide nanoparticles (NPs) as small as 1 nm using wet chemical stain etching. We observe quantum confinement effect for ultrasmall hexagonal SiC NPs in contrast to the cubic SiC NPs. We attribute this difference to the various surface terminations of the two polytypes of SiC NPs.