Tailoring electron beams with high-frequency self-assembled magnetic charged particle micro optics
oleh: R. Huber, F. Kern, D. D. Karnaushenko, E. Eisner, P. Lepucki, A. Thampi, A. Mirhajivarzaneh, C. Becker, T. Kang, S. Baunack, B. Büchner, D. Karnaushenko, O. G. Schmidt, A. Lubk
| Format: | Article |
|---|---|
| Diterbitkan: | Nature Portfolio 2022-06-01 |
Deskripsi
Electron beam manipulation is important for their application in microscopes, lithography instruments, and colliders. Here the authors report a wafer scale, self-assembled, microcoil electrically-driven magnetic charge particle optic device that can be implemented into different configurations for controlling of electron beams.