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This data provides the observation of the interface between lithium phosphorus oxynitride(LiPON) film and lithium layer. In other words, the shape of the lithium electrode protected by the LiPON film after the dissolution/precipitation cycle is provided as images. Also, for clear interpretation of these images, the shape of lithium formed between LiPON and copper current collector is provided as images. Readers are requested to go through the article entitled “Suppression of formation of lithium dendrite via surface modification by 2-D lithium phosphorus oxynitride as a highly stable anode for metal lithium batteries” (Ko et al., 2020) for further interpretation and discussion. Since the article provided only surface images for the above-mentioned items, it is expected that the cross-sectional images provided in this data will help readers to understand the overall contents in depth.