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Ultraviolet photodetector based on vertical β-Ga2O3 nanowire array on GaN substrate
oleh: Chunhong Zeng, Yongjian Ma, Mei Kong, Xiaodong Zhang, Wenkui Lin, Qi Cui, Yuhua Sun, Xuemin Zhang, Tiwei Chen, Xuan Zhang, Baoshun Zhang
Format: | Article |
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Diterbitkan: | IOP Publishing 2021-01-01 |
Deskripsi
Driven by the requirement to ultraviolet detection, β -Ga _2 O _3 UV photodetectors have attracted great attention. Using a metal organic chemical vapor deposition (MOCVD) reactor, we grew β -Ga _2 O _3 nanowires array on a GaN substrate using Ga as catalyst. The density of the nanowires was optimized employing the substrate patterning technology. A UV detector based on the graphene/ β -Ga _2 O _3 -nanowire-array was realized by micro-fabrication techniques. The device has a wide range of UV response covering UVC-UVA band and the peak response reaches 30.82 mA W ^−1 at 258 nm corresponding to the band gap of β -Ga _2 O _3 . The rapid response speed (<1 s) is comparable to that of most reported Ga _2 O _3 nanowire ultraviolet photodetectors.