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Interfacial Reactions between Si and SiO<sub>2</sub> with Ceramic Additives
oleh: Yu-Hsiang Chen, Kun-Lin Lin, Chien-Cheng Lin
Format: | Article |
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Diterbitkan: | MDPI AG 2022-01-01 |
Deskripsi
In this study, 10 wt.% ceramics—Al<sub>2</sub>O<sub>3</sub>, La<sub>2</sub>O<sub>3</sub>, Y<sub>2</sub>O<sub>3</sub>, MgO, and TiO<sub>2</sub>—were employed as additives for amorphous SiO<sub>2</sub> after pressing and annealing at 1300 °C. The amorphous SiO<sub>2</sub> changed to cristobalite SiO<sub>2</sub>. Through X-ray diffraction, scanning electron microscopy, and transmission electron microscopy with energy-dispersive spectrometry, the reaction phases of La<sub>2</sub>Si<sub>2</sub>O<sub>7</sub>, Y<sub>2</sub>Si<sub>2</sub>O<sub>7</sub>, and MgSiO<sub>3</sub> (Mg<sub>2</sub>SiO<sub>4</sub>) were found in the SiO<sub>2</sub> with 10 wt.% La<sub>2</sub>O<sub>3</sub>, Y<sub>2</sub>O<sub>3</sub>, and MgO additives. Cracks formed in the Si and SiO<sub>2</sub>–ceramic additive sites because of the difference in the coefficients of thermal expansion among the Si, SiO<sub>2</sub>, ceramic additives, and reaction phases. After Si came into contact with the SiO<sub>2</sub>–ceramics, two types of microstructures were found: those with and those without an amorphous SiO<sub>2</sub> reaction layer at the interface. Amorphous SiO<sub>2</sub> layer formation is due to the replacement of the Si position in SiO<sub>2</sub> by Al<sup>3+</sup> and Ti<sup>4+</sup> impurities, which can break the bonds between Si atoms. The O content in the Si decreased from 6–9 × 10<sup>17</sup> atoms/cm<sup>3</sup> for SiO<sub>2</sub> to less than ~10<sup>16</sup> for SiO<sub>2</sub>–Al<sub>2</sub>O<sub>3</sub> and SiO<sub>2</sub>–MgO. The average resistivity of the Si was 3 Ω·cm for SiO<sub>2</sub> and decreased to 0.12–0.36 Ω·cm for the SiO<sub>2</sub> with ceramic additives.