Technology for SMD Packaging MOX Gas Sensors

oleh: Nikolay Samotaev, Konstantin Oblov, Anastasia Ivanova, Boris Podlepetsky, Nikolay Volkov, Nazar Zibilyuk

Format: Article
Diterbitkan: MDPI AG 2018-11-01

Deskripsi

The perspective combination of laser micromilling technology and jet (aerosol) printing technologies for ceramic MEMS producing of microhotplate in the surface mounted device (SMD) package for the metal oxide (MOX) sensor is describing. There are discusses technological and economic aspects of small-scale production of gas MOX sensors. Experiments with laser micromilling of Al<sub>2</sub>O<sub>3</sub> ceramics confirmed possibility to produce MEMS microhotplate for MOX gas sensor in SMD package with form-factor SOT-23. Developed technology process is close to 3D prototype philosophy—rapid, simple and cheap.