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Performance of a Diaphragmed Microlens for a Packaged Microspectrometer
oleh: Laura Marcu, Martin Gundersen, Eun-Sok Kim, Thanassis Papaioannou, Joe Lo, Shih-Jui Chen, Qiyin Fang
Format: | Article |
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Diterbitkan: | MDPI AG 2009-02-01 |
Deskripsi
This paper describes the design, fabrication, packaging and testing of a microlens integrated in a multi-layered MEMS microspectrometer. The microlens was fabricated using modified PDMS molding to form a suspended lens diaphragm. Gaussian beam propagation model was used to measure the focal length and quantify M2 value of the microlens. A tunable calibration source was set up to measure the response of the packaged device. Dual wavelength separation by the packaged device was demonstrated by CCD imaging and beam profiling of the spectroscopic output. We demonstrated specific techniques to measure critical parameters of microoptics systems for future optimization of spectroscopic devices