Physical Modeling of <italic>p</italic>-Type Fluorinated Al-Doped Tin-Oxide Thin Film Transistors

oleh: Kadiyam Rajshekar, Hsiao-Hsuan Hsu, Koppolu Uma Mahendra Kumar, P. Sathyanarayanan, V. Velmurugan, Chun-Hu Cheng, D. Kannadassan

Format: Article
Diterbitkan: IEEE 2020-01-01

Deskripsi

Fabrication, physical modeling and dynamic response of p-type Al-doped SnOx active channel thin film transistors (TFTs) are presented for the potential application of ultra-high definition (UHD) displays. After deposition of Al-doped SnOx active layer using reactive co-sputtering, the channel was treated with plasma fluorination which improve the device performance of high ION/IOFF ratio of &gt; 106, low subthreshold swing of ~100 mV/dec and high field-effect mobility (&#x03BC;FE) of 4.8 cm<sup>2</sup>V<sup>-1</sup>s<sup>-1</sup>. To understand the origin of such high performance, physical modeling and numerical simulations were performed using density of state (DOS) model of defects/traps of oxide semiconductor. This model describes the modifications of donor-like tail states and acceptor-like Gaussian defect states due to Al doping on SnO<sub>x</sub> and fluorine treatment. To evaluate the device performance for UHD large scale displays, the dynamic responses of p-type TFT pixel circuit for various requirements are simulated with physical models. These results suggest that the Al-doped SnO<sub>x</sub> TFTs are potential candidates for future high-definition displays and many applications in transparent electronics.