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<b>A</b>bstract: Metal oxide semiconductor gas sensors are used in a various applications in environmental, industrial and medical field, for instance. They are relatively inexpensive compared to other sensing technologies, robust, lightweight, long lasting and benefit from high material sensitivity and quick response times. Copper oxide (CuO) thin film has been promisingly proposed for chemical sensing applications. Particularly, it has been recommended as a sensitive layer for monitoring harmful and combustible gases. It is an attractive material because of nontoxic, inexpensive, abundance advantages, and its fabrication is easy. In this work, we have synthesized CuO thin films by Spray pyrolysis method. The effect of the temperature deposition is investigated:to say 350 °C, 400 °C, and 450 °C while the deposition duration was kipped to 15 min. The samples were analyzed by X-ray diffraction, Raman spectroscopy, XPS analysis, UV-visible transmission and four points probe method.