Fabrication of Crystalline Microresonators of High Quality Factors with a Controllable Wedge Angle on Lithium Niobate on Insulator
oleh: Jianhao Zhang, Zhiwei Fang, Jintian Lin, Junxia Zhou, Min Wang, Rongbo Wu, Renhong Gao, Ya Cheng
| Format: | Article |
|---|---|
| Diterbitkan: | MDPI AG 2019-08-01 |
Deskripsi
We report the fabrication of crystalline microresonators of high quality (Q) factors with a controllable wedge angle on lithium niobate on insulator (LNOI). Our technique relies on a femtosecond laser assisted chemo-mechanical polish, which allows us to achieve ultrahigh surface smoothness as critically demanded by high Q microresonator applications. We show that by refining the polish parameters, Q factors as high as 4.7 × 10<sup>7</sup> can be obtained and the wedge angle of the LNOI can be continuously tuned from 9° to 51°.