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Functional Testing and Characterisation of ISFETs on Wafer Level by Means of a Micro-droplet Cell
oleh: Michael J. Schöning, Mattea Müller-Veggian, Joachim W. Schultze, Christian Rosenkranz, Joachim P. Kloock, Kerstin Schumacher, Arshak Poghossian
Format: | Article |
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Diterbitkan: | MDPI AG 2006-04-01 |
Deskripsi
A wafer-level functionality testing and characterisation system for ISFETs (ion-sensitive field-effect transistor) is realised by means of integration of a specifically designedcapillary electrochemical micro-droplet cell into a commercial wafer prober-station. Thedeveloped system allows the identification and selection of “good†ISFETs at the earlieststage and to avoid expensive bonding, encapsulation and packaging processes for non-functioning ISFETs and thus, to decrease costs, which are wasted for bad dies. Thedeveloped system is also feasible for wafer-level characterisation of ISFETs in terms ofsensitivity, hysteresis and response time. Additionally, the system might be also utilised forwafer-level testing of further electrochemical sensors.