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The behavior of helium in reduced-activation ferritic/martensitic steels was investigated systematically with positron annihilation Doppler broadening measurement and thermal desorption spectroscopy. Specimens were irradiated with helium ions with different energies to various fluences at different temperatures. A threshold fluence was observed above which the rate of formation and growth of helium bubbles dramatically increased. Irradiation at higher temperature could suppress the formation and growth of HenVm clusters with low binding energies and enhance that of helium bubbles and HenVm clusters with high binding energies. Different changes of S parameters were observed in various depth after the irradiation temperature was increased from 523 K to 723 K. Irradiation of 18 keV-He+ enhanced the growth of HenVm clusters and helium bubbles compared with 100 keV-He+ irradiation. A possible mechanism is discussed.