Nano-precision metrology of X-ray mirrors with laser speckle angular measurement
oleh: Hongchang Wang, Simone Moriconi, Kawal Sawhney
| Format: | Article |
|---|---|
| Diterbitkan: | Nature Publishing Group 2021-09-01 |
Deskripsi
A versatile high precision metrology instrument has been developed that surpass the limits of existing metrology techniques and opens up new possibilities to develop next-generation super-polished X-ray mirrors.