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Large-Area Printed Broadband Membrane Reflectors by Laser Interference Lithography
oleh: Jung-Hun Seo, Jungho Park, Deyin Zhao, Hongjun Yang, Weidong Zhou, Byeong-Kwon Ju, Zhenqiang Ma
Format: | Article |
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Diterbitkan: | IEEE 2013-01-01 |
Deskripsi
We report here large-area broadband photonic crystal membrane reflectors (MRs) on glass substrates based on laser interference lithography (LIL) patterning and elastic stamp membrane transfer printing techniques. High-reflectivity broadband MRs on glass were realized with measured reflectivity of 95% around 1300 nm and a bandwidth of about 100 nm. Large-area nanopattern uniformity was experimentally verified with measured reflectivity from multiple locations of the large-area MRs. The work could lead to fabrication of the large-area high-performance MR at low cost with high throughput. The reflectors can be used in many types of optoelectronic and photonic devices.