Low-Concentration Ammonia Gas Sensors Manufactured Using the CMOS–MEMS Technique

oleh: Wei-Chun Shen, Po-Jen Shih, Yao-Chuan Tsai, Cheng-Chih Hsu, Ching-Liang Dai

Format: Article
Diterbitkan: MDPI AG 2020-01-01

Deskripsi

This study describes the fabrication of an ammonia gas sensor (AGS) using a complementary metal oxide semiconductor (CMOS)&#8722;microelectromechanical system (MEMS) technique. The structure of the AGS features interdigitated electrodes (IDEs) and a sensing material on a silicon substrate. The IDEs are the stacked aluminum layers that are made using the CMOS process. The sensing material; polypyrrole/reduced graphene oxide (PPy/RGO), is synthesized using the oxidation&#8722;reduction method; and the material is characterized using an electron spectroscope for chemical analysis (ESCA), a scanning electron microscope (SEM), and high-resolution X-ray diffraction (XRD). After the CMOS process; the AGS needs post-processing to etch an oxide layer and to deposit the sensing material. The resistance of the AGS changes when it is exposed to ammonia. A non-inverting amplifier circuit converts the resistance of the AGS into a voltage signal. The AGS operates at room temperature. Experiments show that the AGS response is 4.5% at a concentration of 1 ppm NH<sub>3</sub>; and it exhibits good repeatability. The lowest concentration that the AGS can detect is 0.1 ppm NH<sub>3</sub>