High-Extraction-Rate Ta<sub>2</sub>O<sub>5</sub>-Core/SiO<sub>2</sub>-Clad Photonic Waveguides on Silicon Fabricated by Photolithography-Assisted Chemo-Mechanical Etching (PLACE)
oleh: Jian Liu, Youting Liang, Lang Gao, Chao Sun, Jianglin Guan, Zhe Wang, Zhaoxiang Liu, Zhiwei Fang, Min Wang, Haisu Zhang, Ya Cheng
| Format: | Article |
|---|---|
| Diterbitkan: | MDPI AG 2024-09-01 |
Deskripsi
We demonstrate high-extraction-rate Ta<sub>2</sub>O<sub>5</sub>-core/SiO<sub>2</sub>-clad photonic waveguides on silicon fabricated by the photolithography-assisted chemo-mechanical etching technique. Low-confinement waveguides of larger than 70% coupling efficiency with optical fibers and medium propagation loss around 1 dB/cm are investigated in the experiment. Monolithic microring resonators based on Ta<sub>2</sub>O<sub>5</sub> waveguides have shown the quality factors to be above 10<sup>5</sup> near 1550 nm. The demonstrated Ta<sub>2</sub>O<sub>5</sub> waveguides and their fabrication method hold great promise in various cost-effective applications, such as optical interconnecting and switching.