Optimization of SnO<sub>2</sub>-Based CMOS-Integrated Gas Sensors by Mono-, Bi- and Trimetallic Nanoparticles
oleh: Robert Wimmer-Teubenbacher, Florentyna Sosada-Ludwikowska, Anton Köck, Stephan Steinhauer, Mukhles Sowwan, Vidyadhar Singh
| Format: | Article |
|---|---|
| Diterbitkan: | MDPI AG 2021-01-01 |
Deskripsi
In this paper, we report on the optimization of SnO<sub>2</sub>-based thin film gas sensor devices by mono-, bi- and trimetallic nanoparticles. Ag, AgRu, and AgRuPd nanoparticles are sputter deposited on CMOS-integrated SnO<sub>2</sub>-thin film gas sensor devices. The CMOS device is a worldwide unique chip containing an array of eight microhotplates. The response towards the target gas CO was dramatically increased from 10% to more than 70% by using trimetallic AgRuPd nanoparticles.