Stress Engineering With Silicon Nitride Stressors for Ge-on-Si Lasers

oleh: Jiaxin Ke, Lukas Chrostowski, Guangrui Xia

Format: Article
Diterbitkan: IEEE 2017-01-01

Deskripsi

Side and top silicon nitride stressors were proposed and shown to be effective in reducing the threshold current I<sub>th</sub> and in improving the wall-plug efficiency &#x03B7;<sub>wp</sub> of Ge-on-Si lasers. Side stressors only turned out to be a more efficient way to increase &#x03B7;<sub>wp</sub> than using the top and side stressors together. With the side stressors and geometry optimizations, a &#x03B7;<sub>wp</sub> of 34.8% and an I<sub>th</sub> of 36 mA (J<sub>th</sub> of 27 kA/cm<sup>2</sup>) can be achieved with a defect limited carrier lifetime (&#x03C4;<sub>p,n</sub>) of 1 ns. With &#x03C4;<sub>p,n</sub> = 10 ns, an I th of 4 mA (J<sub>th</sub> of 3 kA/cm<sup>2</sup>) and a &#x03B7;<sub>w</sub>p of 43.8% can be achieved. These are tremendous improvements from the case with no stressors. These results give strong support to the Ge-on-Si laser technology and provide an effective way to improve the Ge laser performance.