Ultra-low loss silicon nitride becomes even cooler
oleh: Dawn T. H. Tan, Xavier X. Chia
| Format: | Article |
|---|---|
| Diterbitkan: | Nature Publishing Group 2024-09-01 |
Deskripsi
Abstract Ultra-low loss silicon nitride realized using deuterated precursors and low thermal budgets well within backend-of-line CMOS processing may accelerate widespread proliferation of their use.